QuantumATK Forum

QuantumATK => General Questions and Answers => Topic started by: evansjc on June 13, 2025, 22:53

Title: High-K Metal Gate Stack Doping Results in 2021 Webinar
Post by: evansjc on June 13, 2025, 22:53

Hello,

I was looking through past webinars and I saw this figure (attached) in the 2021 webinar titled "Atomistic Simulations of Defects & Dopants with QuantumATK" at the 11:00 minute mark. What is this figure referencing? Are these internal QuantumATK results or are they results from a paper? Are the methods used to obtain these results detailed anywhere? I would appreciate any information on this.

Thank you!

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Title: Re: High-K Metal Gate Stack Doping Results in 2021 Webinar
Post by: Anders Blom on June 18, 2025, 22:58

We have done extensive work on the HKMG stack, but not much is published, mostly we work directly with customers with their specific variations on the problem. I believe there is work going on to create a summary, incl. some tutorial steps how to replicated. I'll check internally, but feel free to remind me a bit later if I forget to follow up :-)

Title: Re: High-K Metal Gate Stack Doping Results in 2021 Webinar
Post by: evansjc on June 19, 2025, 21:51

Hi Anders,

Great! Thank you so much! I look forward to hearing back from you :).

Title: Re: High-K Metal Gate Stack Doping Results in 2021 Webinar
Post by: evansjc on July 22, 2025, 23:04

Hi Anders,

I just wanted to follow up on the summary/tutorial you mentioned. Have there been any updates on that? Thank you again for your help! I really appreciate it.