How to export the data from QuantumATK(version 2023.09) to Sentaurus TCAD?

[Simon Chen]

Hi everyone,

As is written in the subject, I need to transport some data ( e.g. effective mass or mobility) from QuantumATK with version 2023.09 to Sentaurus TCAD, so that I can use the data to calibrate or build some models in Sentaurus process.

I have learned that there is a way that I can click on ' Help' and then click ' add-on managers' to install ' SynopsysTools'. However, this method does not work because I couldn't find this tool in my installed linux version. Another way is to use 'Sentaurus Materials Workbench Reference Manual', but I am not sure I can find an actual way to export the data I need in QuantumATK.

Thank you for reading my questions! If you are knowledgeable enough, please don't hesitate to reply me!

Simon Chen
2025.03.04

[Anders Blom]

The more automated transfer of data was for a narrow and specific task (dopant diffusion) and has since been discontinued.

For most cases, using QuantumATK output in Sentaurus is merely a matter of putting a few numbers in the proper input file place in the TCAD tool, so it doesn't really need a piece of software. If you have more advanced needs, please reach out by PM or email.